Wafer Inspection Microscopes

  1. Rudolph S3000-S, 300mm, s/n: S-1032

    Wafer Inspection Microscopes

    Rudolph S3000-S, 300mm, s/n: S-1032

    Film Measurement

    Tool ID: THK2151

  2. AMAT UVision 3, 300mm, s/n: T7021

    Wafer Inspection Microscopes

    AMAT UVision 3, 300mm, s/n: T7021

    Brightfield Wafer Inspection

    Tool ID: YBFI771

  3. HSEB Axiospect 300, 300mm, s/n: 41302020135

    Wafer Inspection Microscopes

    HSEB Axiospect 300, 300mm, s/n: 41302020135

    Visual Inspection

    Tool ID: OPI901

  4. HSEB Axiospect 300, 300mm, s/n: 41302020169

    Wafer Inspection Microscopes

    HSEB Axiospect 300, 300mm, s/n: 41302020169

    Visual Inspection

    Tool ID: OPI811

  5. HSEB MMT300 V2, 300mm, s/n: 004/01 (2007)

    Wafer Inspection Microscopes

    HSEB MMT300 V2, 300mm, s/n: 004/01 (2007)

    Wafer Inspection Tool

    Tool ID: OPI922

  6. HSEB MMT300 V2, 300mm, s/n: 005/01

    Wafer Inspection Microscopes

    HSEB MMT300 V2, 300mm, s/n: 005/01

    Opt. Macro-inspection

    Tool ID: OPI923

  7. KLA Tencor AIT II, 200mm, s/n: 9145

    Wafer Inspection Microscopes

    KLA Tencor AIT II, 200mm, s/n: 9145

    KLA-Tencor AIT II w/ ADC. Defect Inspection

    Tool ID: J78X

  8. KLA-Tencor AIT II, 200mm, s/n: 9152

    Wafer Inspection Microscopes

    KLA-Tencor AIT II, 200mm, s/n: 9152

    AIT II w/ ADC. Defect Inspection

    Tool ID: X25V

  9. KLA-Tencor AIT II, 200mm, s/n: 9262

    Wafer Inspection Microscopes

    KLA-Tencor AIT II, 200mm, s/n: 9262

    AIT II w/ ADC. Defect Inspection Tool

    Tool ID: V13V

  10. KLA Tencor AIT II, 200mm, s/n: 9234

    Wafer Inspection Microscopes

    KLA Tencor AIT II, 200mm, s/n: 9234

    AIT II w/ ADC. Defect Inspection Tool

    Tool ID: V12V

  11. RUDOLPH S3000-S, 300mm, s/n: S-1082

    Wafer Inspection Microscopes

    RUDOLPH S3000-S, 300mm, s/n: S-1082

    Film Measurement

    Tool ID: THK2550

  12. HSEB, Axiospect 301, Optical Microscope, 300mm

    Wafer Inspection Microscopes

    HSEB, Axiospect 301, Optical Microscope, 300mm

    Cold.  Not working parts include: 

    • Tango Controller (Microscope Stage controller
    • Joystick and keyboard controller
    • Micromotor for fingers edge gripper
    • few powers supplies

      The tool was running with Windows XP professional 2002 service pack 3.

      Tool ID: OPI2800